Surface Mount C-Seal Filter >0.0015μm 30 SLPM Hastelloy® C-22

Name: Surface Mount C-Seal Filter >0.0015μm 30 SLPM Hastelloy® C-22
SKU: 31380019
Availability: InStock

Article no.: 31380019

Surface Mount C-Seal Filter >0.0015μm 30 SLPM Hastelloy® C-22

Article no.: 31380019

Available for registered users.

產品環境

GasShield® Surface Mount Filters provide industry-leading 0.0015 µm filtration for integrated gas systems used on board semiconductor OEM tools. GasShield® products are compliant with SEMI F86-0304 specifications for dimensions of two port components for 1.125” four fastener surface mount gas distribution systems with the C-seal configuration.

技術規格

Article

31380019

首錄 [品牌]

Surface Mount C-Seal Filter

敘述

Surface Mount C-Seal Filter >0.0015μm 30 SLPM Hastelloy® C-22

材質

Hastelloy® C-22

燒結過濾介質材質

Hastelloy® C-22

洩漏率

Up to 10^-9 atm cc/sec

流速

30 SLPM

最大值工作溫度

450° C

類型

C-Seal 1,125"

Particle shedding

Zero particle contribution above background (<1 particle/ft³) per SEMI F43-0308 test method

Total hydrocarbons

Below detectable limits per ASTM F1398 test method

Moisture contribution

<10 ppb after 1 hour at low-flow ambient purge per SEMI F27 test method

Particle removal size

> 0.0015 μm

過濾效率

> 9 LRV (99.9999999% reduction in particles). Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method

尺寸

124,5 mm

28,6 mm

備註

Custom designs and fittings available

Surface Mount C-Seal Filter >0.0015μm 30 SLPM Hastelloy® C-22

Article no.: 31380019

Surface Mount C-Seal Filter >0.0015μm 30 SLPM Hastelloy® C-22

Article no.: 31380019

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