Sentry Series Point-of-Use Gas Filter >0.0015um FSM1/4_FSF1/4 SS316L ( RES RN 9-7-24)

Name: Sentry Series Point-of-Use Gas Filter >0.0015μm Face seal male 1/4 Face seal female 1/4 SS316L < 10µm Ra
SKU: 31331450
Availability: InStock

Article no.: 31331450

Sentry Series Point-of-Use Gas Filter >0.0015um FSM1/4_FSF1/4 SS316L ( RES RN 9-7-24)

Article no.: 31331450

產品不提供線上報價，請聯絡我們的業務工程師。

Available for registered users.

產品環境

The Sentry Series point-of-use filters are cost-effective, all-metal, ultra high purity gas filters that utilize a patented Penta nickel media and provide 9-log filtration of particles down to 0.0015 µm, resulting in particle-free gas.

技術規格

Article

31331450

首錄 [品牌]

Sentry Series Point-of-Use Gas Filter

敘述

Sentry Series Point-of-Use Gas Filter >0.0015μm Face seal male 1/4 Face seal female 1/4 SS316L < 10µm Ra

材質

SS 316L

燒結過濾介質材質

Penta Nickel

最大使用壓力

206.8 barg

洩漏率

Up to 10^-9 atm cc/sec

最大壓差

34.5 bar

最大值工作溫度

450° C

類型

Face seal male/Face seal male

Particle shedding

Zero particle contribution above background (<1 particle/ft³) per SEMI F43-0308 test method

Total hydrocarbons

Below detectable limits per ASTM F1398 test method

Moisture contribution

<10 ppb after 1 hour at low-flow ambient purge per SEMI F27 test method

Particle removal size

> 0.0015 μm

過濾效率

> 9 LRV (99.9999999% reduction in particles). Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method

拋光

Electro polishing

表面處理

<10µm Ra

尺寸

Face seal male 1/4

Face seal female 1/4

Ø D

38,1 mm

71,3 mm

SW (HEX)

15,9

備註

Custom designs and fittings available

Sentry Series Point-of-Use Gas Filter >0.0015um FSM1/4_FSF1/4 SS316L ( RES RN 9-7-24)

Article no.: 31331450

Sentry Series Point-of-Use Gas Filter >0.0015um FSM1/4_FSF1/4 SS316L ( RES RN 9-7-24)

Article no.: 31331450

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