GasShield POU Filter FSM 1/4 >0,0015um Alloy 22 GERESERVEERD NVV/JO TDS 3-7-2020
Article no.: 31331125
GasShield POU Filter FSM 1/4 >0,0015um Alloy 22 GERESERVEERD NVV/JO TDS 3-7-2020
Article no.: 31331125
High purity gas filters provide 9-log filtration of particles down to 0.0015 µm resulting in particle-free gas. For maximum gas filtration efficiency, strength and reliability, GasShield point-of-use gas filters are ideal for ultra high purity gas delivery applications. They are compatible with most high purity electronics grade process gases.
Article
31331125
首錄 [品牌]
Point-of-Use Filter
敘述
Point-of-Use Filter >0.0015μm Face seal male 1/4 Hastelloy® C-22 < 5µm Ra
材質
Hastelloy® C-22
燒結過濾介質材質
Hastelloy® C-22
最大使用壓力
258.5 barg
洩漏率
Up to 10-9 atm cc/sec
最大壓差
68.9 bar
最大值工作溫度
450° C
類型
Face seal male/Face seal male
Particle shedding
Zero particle contribution above background (<1 particle/ft³) per SEMI F43-0308 test method
Total hydrocarbons
Below detectable limits per ASTM F1398 test method
Moisture contribution
<10 ppb after 1 hour at low-flow ambient purge per SEMI F27 test method
Particle removal size
> 0.0015 μm
過濾效率
> 9 LRV (99.9999999% reduction in particles). Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method
表面處理
<5µm Ra
C
Face seal male 1/4
Ø D
19 mm
L
84 mm
SW (HEX)
20,6
備註
Custom designs and fittings available
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